Application No./Patent No.: 2018102536473 Application date: March 26th, 2018.
Inventor/Designer: Li Kai, Peng Zhihui.
A micro-mass sensor. It comprises a substrate, a fixed electrode arranged on the substrate and an adsorption layer, wherein a vibration structure is also arranged on the substrate; the vibration structure comprises a metal movable plate, a supporting beam and an anchor point of the beam; the metal movable plate is connected with the supporting beam and fixed on the substrate through the anchor point; According to the invention, the principle that the vibration frequency of the micro-mass substance is changed after being adsorbed on the vibration structure is utilized. The vibration structure is formed by the movable plate and the supporting beam, so that the influence of the position of the micro-mass substance on the vibration structure on the measurement result can be effectively suppressed; With the metal movable plate as the moving electrode, it has a large area, which is beneficial to improve the electrostatic driving force on the moving electrode, the capacitance between the moving and fixed electrodes, and the anti-interference of the sensor.
