Application No./Patent No.: 2018102530462 Application date: March 26th, 2018.
Inventor/Designer: Li Kai, Peng Zhihui.
A micro accelerometer based on electrostatic adsorption effect. It comprises a lower substrate and an upper substrate, wherein a movable plate, support beams and anchor points thereof, support columns, fixed driving electrodes, movable driving electrodes, fixed switching electrodes and movable switching electrodes are arranged between the lower and upper substrates; According to the invention, the acceleration is measured by measuring the closing time of the switch electrode. According to the invention, a combined structure consisting of a rigid original plate and a supporting beam thereof is taken as a movable structure, so that the movable and fixed switch electrodes have lower contact resistance, and the movable and fixed driving motors have larger electrostatic adsorption force, thereby preventing the movable switch electrode from rebounding after contacting the fixed switch electrode and realizing the measurement of high acceleration. Whether the supporting beam in the invention is a non-straight beam can effectively eliminate the influence of thermal stress on acceleration measurement.
