Instrument Name：3D topography laser microscopy system
Serial number for instruments：20160908
specifications and models：OLS4100
Date of purchase：2015/11/12
Parameters：OLS4100 host (OLS4100-SAF): OLS4100 laser scanning control system, OLS4100 control box, frame suitable for 100*100mm standard table, 100*100mm two-dimensional electric stage, OLS4100 electric objective turntable; Main computer (ols41-CTL-s-e); Display screen (ols41-FPD-2-1); Differential interference prism (U-DICR); The 5X objective lens (mplfln5x); Flat field semi-achromatic objective 5x; Parameters: the primary aperture is 0.15 and the working distance is 20nm.
Functions：This system is a 3D measurement laser microscope with confocal optical system, which has the characteristics of high resolution and high contrast, and obviously improves the resolution in the optical axis direction. It can improve the image quality, measure the line width and uneven section, and display images in various ways.
