Key technologies and applications of high-sensitivity pressure sensors in the field of micro-pressure
This achievement won the third prize of Zhejiang Science and Technology Progress in 2019. Aiming at the key technical problems such as low output sensitivity, poor product stability and short service life of micro-sensor, the piezoresistive effect, mechanical behavior and interface thermodynamic model of nano-silicon thin film were established theoretically, and a novel physical construction and design method of nano-silicon thin film pressure sensor chip was proposed. The mass manufacturing process of unilateral pressure sensor chip and the compensation method of temperature coefficient of ultra-low range nano-silicon pressure sensor with high precision and wide temperature range were also proposed. The pressure sensor independently developed by the project is applied to constant pressure control systems such as pressure transmitter, flow measurement and control instrument, intelligent water pump control system, etc., which solves the problems of frequent start of small flow and pressure collection and measurement and control without flow sensor in variable frequency constant pressure water supply system. After the products are popularized and applied, the sales increased by 229.4 million yuan, the tax increased by 25.686 million yuan, and the export earned 157.55787 million yuan.
