Application No./Patent No.: 2018102530477 Application date: March 26th, 2018.
Inventor/Designer: Li Kai, Peng Zhihui.
A contact mode micro accelerometer. Comprises a lower substrate and an upper substrate, wherein support columns, a thin plate and a plurality of support beams and anchor points of beams are arranged between the lower substrate and the upper substrate; the lower substrate and the upper substrate are respectively provided with lower and upper fixed electrodes; the lower and upper surfaces of the thin plate are respectively provided with lower and upper moving electrodes; According to the invention, the principle of electrokinetic deformation caused by acceleration force to change the capacitance between the electrokinetic deformation electrode and the fixed electrode is utilized to work. According to the invention, the insulation layer positioned on the fixed electrode prevents the short circuit of the moving and fixed electrodes, and the insulation layer provides support for the movable structure, so that high acceleration measurement can be realized, and the beam-circular thin plate combined structure can effectively inhibit the capacitance saturation of the sensor.
