Application No./Patent No.: 201810232197X Application date: December 22, 2016.
Inventor/Designer: Cao Yu, He An, Sun Ke, Xu Wenjun, Zhang Jian, Liu Wenwen, Xue Wei, Chen Yifeng.
The invention provides a galvanometer scanning laser processing method for coaxial real-time detection, which comprises the following steps: (1) configuring the spatial orientation of a processing laser beam L1, a detection laser beam L2, a transflective mirror M1 and a galvanometer scanning focusing system; (2) carry out height calibration on that workpiece; (3) simultaneously turning on the processing laser beam L1 and the detection laser beam L2 for laser processing, calculating whether the processing depth △Z generated by the current laser processing meets the processing requirements, if not, optimizing and adjusting the process parameters of laser processing in real time, and jumping to step 3; (5) If multiple times of processing are required, repeat steps 2 to 4. The galvanometer scanning laser processing method disclosed by the invention realizes real-time coaxial processing depth detection during galvanometer scanning laser processing, and solves the technical problem of intelligent control of processing depth by combining real-time online adjustment of laser processing parameters.
