Research and development of monolithic integrated triaxial acceleration sensor for consumer electronics
Major scientific and technological innovation projects in Wenzhou
In this project, the three-axis convective accelerometer is taken as the research object, and its design principle and chip manufacturing process compatible with IC process are deeply studied to manufacture the three-axis accelerometer for consumer electronic products with high sensitivity, low power consumption and low cost. It is innovatively proposed that the cantilever beam with thermopile is bent downward by using the difference of internal stress of composite film in surface micromachining compatible with CMOS process. Therefore, two groups of thermopiles for detecting the acceleration of z-axis (up and down direction) are respectively arranged above and below the heater, so that when the device is subjected to the acceleration in the up and down direction, the temperature at the thermopiles in the up and down positions changes, thereby testing the acceleration of z-axis. The project is dedicated to the research of surface micromachining technology, and the success of industrialization will provide the sensor modules with high requirements, low power consumption and high precision for consumer electronic products. In theory, it solves the problems of optimized preparation of various thin films and complete surface micromachining technology research, so the implementation of the project is of great significance to enhance our country's competitiveness in the field of MEMS, as well as theoretical breakthrough. The success of industrialization and great market potential will promote the progress of China's micro-sensor technology and make positive contributions to the revitalization of China's instrumentation industry and the development of national industries.
