Application No./Patent No.: 2017216156004 Application date: November 28th, 2017.
Inventor/Designer: Feng Aixin, Yang Haihua, Zhang Jinchao, Xue Wei, Zhao Ying, Cheng Hao, Chen Huan, Jia Tiandai and liuyong.
The utility model relates to a multifunctional ultrafast laser micromachining system, wherein the output end of ultrafast laser is provided with a frequency doubling module which is provided with three wave band light outlets, the first wave band output light path is provided with a first light path transmission module, the second wave band output light path is provided with a second light path transmission module, and the output light beam is a beam combined with a beam combiner, and the output end of the beam combiner is sequentially provided with a first light path switching device, a second light path switching device and a third light path switching device. A third light path transmission module is arranged on the third band output light path, and the light beam output by the third light path transmission module is on another light path. The output end of the third light path transmission module is sequentially provided with a fourth light path switching device, a fifth switching device and a sixth reflector, the centers of which are respectively aligned with the centers of the first light path switching device, the second light path switching device and the third light path switching device in the vertical direction. To realize the machining mode of several combinations.
